Title:
ETCHANT COMPOSITION
Document Type and Number:
Japanese Patent JP2023174536
Kind Code:
A
Abstract:
To provide an etchant composition which can suppress lateral-direction etching of titanium nitride in a limited area.SOLUTION: An etchant composition comprises: an oxidant; an organic tertiary amine or quaternary amine represented by the formulae (1) or (2); a basic compound; and a solvent, of which pH is 7 or above.SELECTED DRAWING: None
Inventors:
ZHANG YUANJIA
CHOU PO TING
CHUNG MING-YEN
CHOU PO TING
CHUNG MING-YEN
Application Number:
JP2023069433A
Publication Date:
December 07, 2023
Filing Date:
April 20, 2023
Export Citation:
Assignee:
TOKYO OHKA KOGYO CO LTD
International Classes:
H01L21/306
Attorney, Agent or Firm:
田▲崎▼ 聡
Ryu Miyamoto
Emi Hattori
Takuya Shiraishi
Ryu Miyamoto
Emi Hattori
Takuya Shiraishi