Title:
FILM DEPOSITION APPARATUS, WASHING APPARATUS, AND HOLDING METHOD
Document Type and Number:
Japanese Patent JP2016199790
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a film deposition apparatus or a washing apparatus for suppressing a heater from leaving the inner wall of a container.SOLUTION: The inner wall of a recovery chamber 20 is equipped with a heater 100. Moreover, two bearing members 300 oppose to each other through the heater 100. Moreover, a holding shaft 400 is disposed across the two bearing members 300. The holding shaft 400 has a curved surface 402 and a flat surface 404 directed toward the mutually opposite sides. The curved surface 402 has a recess 410. In the case where the holding shaft 400 is supported in the direction where the curved surface 402 opposes the inner wall of the recovery chamber 20, the recess 410 covers the heater 100.SELECTED DRAWING: Figure 10
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Inventors:
YAGUCHI YUICHI
SAKABA JUNICHI
SAKABA JUNICHI
Application Number:
JP2015080980A
Publication Date:
December 01, 2016
Filing Date:
April 10, 2015
Export Citation:
Assignee:
FURUKAWA CO LTD
SUWAN SEIKI KK
SUWAN SEIKI KK
International Classes:
C23C16/44; C30B25/10; C30B35/00; H01L21/205
Attorney, Agent or Firm:
Shinji Hayami