Title:
ガス電界電離イオン源
Document Type and Number:
Japanese Patent JP7189078
Kind Code:
B2
Abstract:
A gas field ionization source for forming an electric field for ionizing gas comprises: an emitter tip having a tip end; an extraction electrode facing the emitter tip and having an aperture at a position distant therefrom; a gas supply means for supplying the gas in the vicinity of the emitter tip; a vacuum partition made of a metal having a hole; and a high voltage power source for applying voltage between the emitter tip and the extraction electrode. The hole is constructed so that the tip end of the emitter tip can pass therethrough and the vacuum partition has a micro protrusion, around the hole, protruding toward a side of the extraction electrode.
Inventors:
Shinichi Matsubara
Application Number:
JP2019091313A
Publication Date:
December 13, 2022
Filing Date:
May 14, 2019
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H01J27/26
Domestic Patent References:
| JP2007227102A | ||||
| JP2072544A | ||||
| JP58004252A | ||||
| JP2009059628A | ||||
| JP63216247A | ||||
| JP2009059627A | ||||
| JP2004362936A | ||||
| JP2009245767A |
Foreign References:
| WO2012086419A1 |
Attorney, Agent or Firm:
Patent Attorney Corporation Hiraki International Patent Office