Title:
研削装置
Document Type and Number:
Japanese Patent JP7446722
Kind Code:
B2
Abstract:
Provided is a grinding apparatus which is able to allow a user to replace a grinding wheel in a timely manner, and to perform dressing or the like to regenerate a surface of a grinding stone. According to the present invention, the grinding apparatus (1) comprises: a camera (50) which photographs the grinding stones (33a, 43a), and a control means (100). The control means (100) comprises: a first image memory unit (112) which memorizes reference images (Gb1, Gb2) of the grinding stones (33a, 43a); a second image memory unit (114) which memorizes images (G1, G2) of the grinding stones (33a, 43a) photographed by the camera (50); a status detection unit (120) which compares the reference images (Gb1, Gb2) memorized by the first image memory unit (112) and the images (G1, G2) memorized by the second image memory unit (114), and detects the lacking statuses (G1c, G2c) and the blocked statuses (G1d, G2d) in the grinding stones (33a, 43a) of the images (G1, G2) memorized by the second image memory unit (114); a lack determination unit (132) which determines whether the lacking statuses (G1c, G2c) detected by the status detection unit (120) is within allowable levels (Q1c, Q2c) or not; and a blocking determination unit (134) which determines whether the blocked statuses (G1d, G2d) detected by the status detection unit (120) are within the allowable levels (Q1d, Q2d) or not.
Inventors:
Hiroki Miyamoto
Application Number:
JP2019092178A
Publication Date:
March 11, 2024
Filing Date:
May 15, 2019
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B49/12; B24B45/00; B24B49/18; B24B53/00; H01L21/304
Domestic Patent References:
| JP2018192572A | ||||
| JP2008122273A | ||||
| JP2008155292A |
Foreign References:
| US20130316618 |
Attorney, Agent or Firm:
Atago Patent Attorneys Office
Sachiko Okunuki
Tsuyoshi Tsukano
Yoshifumi Kaneko
Sachiko Okunuki
Tsuyoshi Tsukano
Yoshifumi Kaneko