Title:
The inductively-coupled-plasma mass spectrometry method
Document Type and Number:
Japanese Patent JP6066338
Kind Code:
B2
Inventors:
Kenji Araki
Application Number:
JP2014069097A
Publication Date:
January 25, 2017
Filing Date:
March 28, 2014
Export Citation:
Assignee:
Shin-Etsu Semiconductor Co., Ltd.
International Classes:
G01N27/62
Domestic Patent References:
| JP2007343A | ||||
| JP4249056A | ||||
| JP6096724A | ||||
| JP9033439A |
Foreign References:
| US6222186 |
Attorney, Agent or Firm:
Ryuji Harikawa