Title:
イオン検出器
Document Type and Number:
Japanese Patent JP7330138
Kind Code:
B2
Abstract:
An ion detector includes a microchannel plate configured to generate secondary electrons upon reception of ions incident thereon and multiply and output the generated secondary electrons; a plurality of electron impact-type diodes configured to have effective regions narrower than an effective region of the microchannel plate, receive the incident secondary electrons output from the microchannel plate, and multiply and detect the incident secondary electrons; a focus electrode configured to be disposed between the microchannel plate and the electron impact-type diodes and focus the secondary electrons toward the electron impact-type diodes; and a voltage supply part configured to apply a drive voltage to each of the plurality of electron impact-type diodes.
Inventors:
Hiroyuki Kobayashi
Seika Takatsuka
Seika Takatsuka
Application Number:
JP2020101542A
Publication Date:
August 21, 2023
Filing Date:
June 11, 2020
Export Citation:
Assignee:
Hamamatsu Photonics K.K.
International Classes:
H01J49/02; H01J43/24; H01J49/06
Domestic Patent References:
| JP7073847A | ||||
| JP11288684A | ||||
| JP2013175440A |
Foreign References:
| US20080073548 | ||||
| US5326978 | ||||
| US20130187057 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Kenichi Shibayama
Yoshiki Kuroki
Kenichi Shibayama
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