Title:
加圧用吸着台およびこれを具備する加圧装置
Document Type and Number:
Japanese Patent JP7330139
Kind Code:
B2
Abstract:
A pressurizing suction-attachment table (1) is provided with a porous body (2) having a suction-attachment surface (20) on which an object (O) can be placed, an elastic member (3) directly provided to the porous body (2), and a frame body (5) supporting the porous body (2) with the elastic member (3) therebetween. An aspiration space (4) is formed between the porous body (2) and the frame body (5). The pressurizing suction-attachment table (1) is provided with an aspirator (6) capable of aspirating the aspiration space (4) to cause the object (O) to be suction-attached to the suction-attachment surface (20). The porous body (2) includes an opposite surface (21) positioned on a side opposite to the suction-attachment surface (20). The frame body (5) includes a receiving surface (51) for receiving the opposite surface (21) when the elastic member (3) is elastically deformed due to pressurization of the object (O) placed on the suction-attachment surface (20) onto the suction-attachment surface (20). The pressurizing suction-attachment table (1) is configured such that, when the opposite surface (21) is received by the receiving surface (51), the porous body (2) applies a uniform reactive force to the object (O) being pressurized.
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Inventors:
Kenji Okamoto
Application Number:
JP2020105171A
Publication Date:
August 21, 2023
Filing Date:
June 18, 2020
Export Citation:
Assignee:
Hitachi Zosen Corporation
International Classes:
H01L21/683
Domestic Patent References:
| JP2014216230A | ||||
| JP976088A | ||||
| JP202075774A | ||||
| JP201413802A | ||||
| JP2012213836A | ||||
| JP2016197623A |
Foreign References:
| KR1020040084128A |
Attorney, Agent or Firm:
Morimoto International Patent Office