Title:
LiCoO2-CONTAINING SINTERED BODY, LiCoO2-CONTAINING SPUTTERING TARGET, AND PRODUCTION METHOD OF LiCoO2-CONTAINING SINTERED BODY
Document Type and Number:
Japanese Patent JP2017075377
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To achieve hardly-broken and easily-handleable LiCoO-containing sintered body capable of quickening a deposition rate during sputtering, in particular, even when depositing only by pulse DC discharge sputtering, and suppressing generation of flake caused by sputtering.SOLUTION: LiCoO-containing sintered body is characterized by satisfying the whole following conditions: average crystal grain size is 10-40 μm, relative density is 90% or higher, and resistivity is 100 Ω-cm or less.SELECTED DRAWING: None
Inventors:
TAKETOMI YUICHI
YOSHIDA SHINTARO
KANAMARU MORIYOSHI
YOSHIDA SHINTARO
KANAMARU MORIYOSHI
Application Number:
JP2015203796A
Publication Date:
April 20, 2017
Filing Date:
October 15, 2015
Export Citation:
Assignee:
KOBELCO KAKEN:KK
International Classes:
C23C14/34; C04B35/00; H01M4/525
Domestic Patent References:
| JP2014198901A | 2014-10-23 |
Foreign References:
| WO2015146574A1 | 2015-10-01 | |||
| WO2014142197A1 | 2014-09-18 | |||
| WO2011086650A1 | 2011-07-21 | |||
| WO2011086649A1 | 2011-07-21 |
Attorney, Agent or Firm:
Takuji Yamada
Norihito Yamao
Noriko Cauldron
Masahiro Sasaki
Kyuichi Ueki
Hisahiko Ueki
Tadashi Sugakawa
Hiroaki Ito
Uemura Junko
Norihito Yamao
Noriko Cauldron
Masahiro Sasaki
Kyuichi Ueki
Hisahiko Ueki
Tadashi Sugakawa
Hiroaki Ito
Uemura Junko