A manufacturing method and a heating element CVD device of a forming object provided with a compound heating element and the thin film using it

Title:

A manufacturing method and a heating element CVD device of a forming object provided with a compound heating element and the thin film using it

Document Type and Number:

Japanese Patent JP6043346

Kind Code:

B2

Inventors:

Hiroyasu Tabuchi
Eitaro Matsui
Masaki Nakatani

Application Number:

JP2014514736A

Publication Date:

December 14, 2016

Filing Date:

May 08, 2013

Export Citation:

Assignee:

Kirin Brewery Co., Ltd.

International Classes:

C23C16/44

Domestic Patent References:

Attorney, Agent or Firm:

Katsuhiro Imashita
Kenji Okada

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