Title:
NOZZLE SUBSTRATE, INK JET PRINT HEAD AND MANUFACTURING METHOD OF NOZZLE SUBSTRATE
Document Type and Number:
Japanese Patent JP2018086810
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a nozzle substrate in which the shape and size of the lateral cross section of an ink discharge passage formed on a water repellent film are substantially the same as the shape and size of the lateral cross section of an ink discharge passage formed on a silicon substrate.SOLUTION: A nozzle hole 20 includes: a recess 20a which is formed on one surface of a silicon substrate 30; and an ink discharge passage 20b which is formed on the bottom surface of the recess 20a and penetrates the bottom wall of the recess 20a. The ink discharge passage 20b includes: a first ink discharge passage 20b1 which penetrates the bottom wall of the recess 20a in the silicon substrate 30; a second ink discharge passage 20b2 which penetrates an adhesion layer 31; and a third ink discharge passage 20b3 which penetrates a water repellent film 32. The inner peripheral surface of the third ink discharge passage 20b3 is substantially vertical to the surface of the silicon substrate 30.SELECTED DRAWING: Figure 5
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Inventors:
KUROKAWA EITARO
Application Number:
JP2016231797A
Publication Date:
June 07, 2018
Filing Date:
November 29, 2016
Export Citation:
Assignee:
ROHM CO LTD
International Classes:
B41J2/14; B41J2/16
Domestic Patent References:
| JP2011073282A | 2011-04-14 | |||
| JP2009119724A | 2009-06-04 | |||
| JP2012106364A | 2012-06-07 | |||
| JP2013188874A | 2013-09-26 | |||
| JP2011183646A | 2011-09-22 | |||
| JP2003237086A | 2003-08-26 | |||
| JP2013022860A | 2013-02-04 |
Foreign References:
| US20130242000A1 | 2013-09-19 |
Attorney, Agent or Firm:
Patent Business Corporation Ai Patent Office