A manufacturing method of salt, a resist composition, and a resist pattern

Title:

A manufacturing method of salt, a resist composition, and a resist pattern

Document Type and Number:

Japanese Patent JP6095954

Kind Code:

B2

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Inventors:

Koji Ichikawa
Mitsuyoshi Ochiai
Yuko Yamashita

Application Number:

JP2012252171A

Publication Date:

March 15, 2017

Filing Date:

November 16, 2012

Export Citation:

Assignee:

Sumitomo Chemical Co., Ltd.

International Classes:

C07C309/24; C07C381/12; G03F7/004; G03F7/039

Domestic Patent References:

JP2011242546A
JP2011016794A

Foreign References:

US20110117495

Attorney, Agent or Firm:

Fukami patent office

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