Title:
静電容量型超音波振動子の製造方法、当該製造方法によって製造された静電容量型超音波振動子を備えた超音波内視鏡装置、静電容量型超音波プローブおよび静電容量型超音波振動子
Document Type and Number:
Japanese Patent JP4347885
Kind Code:
B2
Abstract:
It becomes possible to obtain high sound pressure in a high frequency domain by a capacitive ultrasonic transducer which comprises a membrane 9 on which one electrode 7 is formed, a cavity 13 constructed in its backface, and a substrate 2 on which these are mounted and supported and on whose surface an electrode 12 is provided, on a surface in an ultrasonic transmission and reception side, characterized in that the membrane 9 comprises two or more layers, and at least one layer of them comprises a high dielectric constant film 8.
Inventors:
Hideo Adachi
Norihiko Sawada
Katsuhiro Wakabayashi
Akiko Mizunuma
Takuya Imahashi
Masayuki Omura
Yoshiyuki Okuno
Shuji Otani
Murakami Mineyuki
Kiyoshi Nemoto
Kozaburo Suzuki
Naomizu Shimoda
Norihiko Sawada
Katsuhiro Wakabayashi
Akiko Mizunuma
Takuya Imahashi
Masayuki Omura
Yoshiyuki Okuno
Shuji Otani
Murakami Mineyuki
Kiyoshi Nemoto
Kozaburo Suzuki
Naomizu Shimoda
Application Number:
JP2006514130A
Publication Date:
October 21, 2009
Filing Date:
June 02, 2005
Export Citation:
Assignee:
Olympus Endo Technology America Inc.
International Classes:
H04R19/00; A61B8/00; A61B8/12; B06B1/02; B81B3/00; B81C1/00; B81C3/00; G01N29/04; G01N29/24; H04R23/00; H04R31/00
Domestic Patent References:
| JP2004135223A | ||||
| JP2002261548A | ||||
| JP2004085575A | ||||
| JP2004039868A |
Attorney, Agent or Firm:
Susumu Ito