Title:
ナノ構造炭素材料の製造方法、前記製造方法により形成されたナノ構造炭素材料および前記ナノ構造炭素材料を有する基板
Document Type and Number:
Japanese Patent JP5002960
Kind Code:
B2
Abstract:
A method for forming nanostructured carbons comprising the steps of: generating a plasma by supplying at least a discharge gas between opposing electrodes and applying a high-frequency voltage between the electrodes under an approximately atmospheric pressure; existing a material gas for forming the nanostructured carbons with the plasma to generate an activated material gas; and exposing a substrate to the activated material gas.
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Inventors:
Keikazu Kondo
Application Number:
JP2005515470A
Publication Date:
August 15, 2012
Filing Date:
November 08, 2004
Export Citation:
Assignee:
Konica Minolta Holdings Co., Ltd.
International Classes:
C01B31/02; B82B1/00; B82B3/00; D01F9/12; H05H1/24
Domestic Patent References:
| JP2002115071A | 2002-04-19 | |||
| JP2001064775A | 2001-03-13 | |||
| JP2000057934A | 2000-02-25 | |||
| JP2003201568A | 2003-07-18 | |||
| JP2004068143A | 2004-03-04 |
Attorney, Agent or Firm:
Gwangyang International Patent Office