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Title:
A mounting base and a plasma treatment apparatus
Document Type and Number:
Japanese Patent JP6174210
Kind Code:
B2
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Inventors:
Yasushi Tazawa
Muto Makoto
Application Number:
JP2016160503A
Publication Date:
August 02, 2017
Filing Date:
August 18, 2016
Export Citation:
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Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
H01L21/683; C23C14/50; C23C16/458; C23C16/505; H01L21/3065
Domestic Patent References:
JP200345949A
JP2004349665A
JP10303286A



 
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