ボラジン系樹脂組成物、絶縁被膜及びその形成方法

Title:

ボラジン系樹脂組成物、絶縁被膜及びその形成方法

Document Type and Number:

Japanese Patent JP5550118

Kind Code:

B2

Abstract:

To provide a method for producing a borazine-based resin composition capable of effectively forming an insulation coating containing little metallic impurities and sufficiently suppressing generation of leakage current.

The method for producing a borazine-based resin composition includes: producing a polymer having a borazine skeleton on the main chain or a side chain by a process comprising a first step for polymerizing a B,B',B''-trialkynylborazine and a hydrosilane in the presence of a solid catalyst and a second step for removing the catalyst after completing the first step, wherein the solid catalyst is a platinum-alumina catalyst or the like and the hydrosilane is represented by formula (2); and obtaining the borazine-based resin composition containing the polymer and a solvent capable of dissolving the polymer. In the formula (2), R3and R4represent identical or different monovalent groups selected from among alkyl groups, aryl groups, aralkyl groups and a hydrogen atom, and R5represents a substituted or unsubstituted aromatic divalent group, an oxypoly(dimethylsiloxy) group or an oxygen atom.

Inventors:

Hiroshi Matsutani
Inner circle Yuko

Application Number:

JP2011020167A

Publication Date:

July 16, 2014

Filing Date:

February 01, 2011

Export Citation:

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Assignee:

Hitachi Chemical Co., Ltd.
Independent administrative institution National Institute of Advanced Industrial Science and Technology

International Classes:

C08G79/08; C08G77/56; C08L83/14; C08L85/04; C09D5/25; C09D183/14; C09D185/04; H01L21/312; H01L21/318

Attorney, Agent or Firm:

Yoshiki Hasegawa
Yoshinori Shimizu
Hiroyuki Hirano
Hideki Okita

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