脂環構造を有する新規ラクトン化合物及びその製造方法

Title:

脂環構造を有する新規ラクトン化合物及びその製造方法

Document Type and Number:

Japanese Patent JP4081640

Kind Code:

B2

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Inventors:

Tsuyoshi Kanao
Koji Hasegawa
Takeshi Watanabe
Tsunehiro Nishi
Mutsuko Nakajima
Seiichiro Tachibana
Jun Hatakeyama

Application Number:

JP2001146056A

Publication Date:

April 30, 2008

Filing Date:

May 16, 2001

Export Citation:

Assignee:

Shin-Etsu Chemical Co., Ltd.

International Classes:

C07D307/33; G03F7/039; C08F32/00; C08G61/08; H01L21/027

Domestic Patent References:

JP2000109545A
JP11223950A

Foreign References:

EP0930541A1

Attorney, Agent or Firm:

Takashi Kojima
Yuko Nishikawa

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