Title:
プラズマ生成用ガス通過管の製造方法
Document Type and Number:
Japanese Patent JP3746586
Kind Code:
B2
Abstract:
A passage tube including a ceramic tube body through which plasma producing gas passes and is irradiated from outside the ceramic tube body with ultraviolet rays, and a ceramic flange member joined to an outer peripheral surface of the ceramic tube body, is manufactured by forming calcined bodies for the passage tube body and flange member, machining the calcined body for the tube body so as to form a first portion and a second portion having an outer diameter larger than that of the first portion, joining the calcined body for the flange member to a stepped region between the first portion and the second portion and sintering them.
Inventors:
Toshio Ohashi
Asai Michio
Asai Michio
Application Number:
JP7532797A
Publication Date:
February 15, 2006
Filing Date:
March 27, 1997
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
H05H1/24; B28B21/92; C04B35/64; C04B37/00; H01L21/205; H01L21/302; H01L21/3065
Domestic Patent References:
| JP10072684A | ||||
| JP6191959A | ||||
| JP6279134A |
Attorney, Agent or Firm:
Kosaku Sugimura
Norita Tomita
Hiroshi Tokunaga
Kazuaki Takami
Umemoto Masao
Juno Aoki
Shiro Fujitani
Norita Tomita
Hiroshi Tokunaga
Kazuaki Takami
Umemoto Masao
Juno Aoki
Shiro Fujitani