Title:
ロボットハンド
Document Type and Number:
Japanese Patent JP7287332
Kind Code:
B2
Abstract:
To provide a robot hand that can transport substrates stably and suppress a phenomenon that, when a substrate is clamped with the robot hand, friction between a supporter and the substrate causes local particles to adhere to a surface of the substrate, compared to a conventional robot hand.SOLUTION: A robot hand includes a first supporter and a second supporter including a projection, a hand base on which the second supporter is fixed, a substrate pressing member that presses a substrate from an outer peripheral side surface, and a slide mechanism that can slide the first supporter and the substrate pressing member front and back with respect to the second supporter on the hand base. The slide mechanism slides the substrate pressing member to the second supporter and moves the substrate by pressing the substrate into the second supporter; thus, the substrate is held between the substrate pressing member and the projection of the second supporter. The slide mechanism slides the first supporter to the second supporter in a direction where the first supporter is hidden by the held substrate in a plan view.SELECTED DRAWING: Figure 1
Inventors:
Shohei Yoshioka
Application Number:
JP2020068153A
Publication Date:
June 06, 2023
Filing Date:
April 06, 2020
Export Citation:
Assignee:
Shin-Etsu Semiconductor Co., Ltd.
International Classes:
H01L21/677; B25J15/00
Domestic Patent References:
| JP2011199229A | ||||
| JP2009253115A | ||||
| JP2019197799A | ||||
| JP2017183665A | ||||
| JP2005209954A |
Foreign References:
| US20030067180 |
Attorney, Agent or Firm:
Mikio Yoshimiya
Toshihiro Kobayashi
Toshihiro Kobayashi