A roll for electron beam exposure, and a manufacturing method for the same

Title:

A roll for electron beam exposure, and a manufacturing method for the same

Document Type and Number:

Japanese Patent JP6121167

Kind Code:

B2

Inventors:

Kiguchiya Hidenari
Masayuki Abe

Application Number:

JP2013003781A

Publication Date:

April 26, 2017

Filing Date:

January 11, 2013

Export Citation:

Assignee:

ASAHI KASEI KABUSHIKI KAISHA

International Classes:

H01L21/027; G03F7/20

Domestic Patent References:

Foreign References:

US20070042129

Attorney, Agent or Firm:

Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito

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