Title:
SUBSTRATE AND ELECTRONIC ELEMENT
Document Type and Number:
Japanese Patent JP2017165642
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a substrate in which a high mobility can be stably ensured when manufacturing an electronic element in which the graphene film serves as a conductive part.SOLUTION: The substrate 1 includes: a support substrate 2 having a first main surface 2A and in which the surface layer region including at least said first main surface 2A is made of any one of material selected from the group consisting of boron nitride, molybdenum disulfide, tungsten disulfide, niobium disulfide and aluminum nitride; and a graphene film 3 disposed on the first main surface 2A and having an atomic arrangement oriented with respect to the atomic arrangement of the material constituting the surface layer region.SELECTED DRAWING: Figure 1
Inventors:
OKADA MASAYA
MIHASHI FUMINORI
TATENO YASUNORI
UENO MASANORI
MIHASHI FUMINORI
TATENO YASUNORI
UENO MASANORI
Application Number:
JP2016234450A
Publication Date:
September 21, 2017
Filing Date:
December 01, 2016
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES
International Classes:
C01B32/15; C01B32/18; C01B32/182; H01L21/336; H01L29/786; H01L51/05; H01L51/30
Attorney, Agent or Firm:
Shuhei Kitano
Katsuya Tanaka
Katsuya Tanaka
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