Title:
The vacuum exhaust air system which uses a thread groove type vacuum pump and this
Document Type and Number:
Japanese Patent JP5989645
Kind Code:
B2
Inventors:
Manabu Nonaka
Takeshi Kabazawa
Takuya Matsuo
Takeshi Kabazawa
Takuya Matsuo
Application Number:
JP2013523853A
Publication Date:
September 07, 2016
Filing Date:
May 07, 2012
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
F04D19/04
Domestic Patent References:
| JP63040598U | ||||
| JP2011033026A | ||||
| JP6047238A | ||||
| JP4006593U | ||||
| JP63147990A | ||||
| JP2006046074A | ||||
| JP4370394A | ||||
| JP2007518010A |
Attorney, Agent or Firm:
Takakichi Hayashi
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