Title:
ABNORMALITY MANAGEMENT METHOD, MANAGEMENT DEVICE, AND STORAGE MEDIUM
Document Type and Number:
WIPO Patent Application WO/2024/053421
Kind Code:
A1
Abstract:
This abnormality management method for a conveying arm includes: an acquisition step for acquiring target data, which are transition data of an abnormality scale calculated on the basis of a feature quantity relating to a conveying operation of the conveying arm; an identification step for comparing the target data acquired in the acquisition step and reference data, which are a plurality of items of transition data leading to an occurrence of an abnormality, acquired in the past and held in advance, and identifying at least one set of reference data similar to the target data on the basis of a result of the comparison; an estimating step for estimating an abnormality occurrence predicted time in the conveying arm for which the target data have been acquired, on the basis of an abnormality occurrence time in the at least one set of reference data identified in the identification step; and an output step for outputting information indicating the abnormality occurrence predicted time estimated in the estimating step.
Inventors:
IWANAGA SHUJI (JP)
Application Number:
PCT/JP2023/030597
Publication Date:
March 14, 2024
Filing Date:
August 24, 2023
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
G05B23/02; H01L21/02; H01L21/027; H01L21/677
Foreign References:
| JP2020086694A | 2020-06-04 | |||
| JP7036261B1 | 2022-03-15 | |||
| JP2017011126A | 2017-01-12 | |||
| JP2018178157A | 2018-11-15 | |||
| JP2018147443A | 2018-09-20 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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