Title:
ACCOMMODATING CONTAINER, SHUTTER OPENING AND CLOSING UNIT FOR ACCOMMODATING CONTAINER, AND WAFER STOCKER USING SAME
Document Type and Number:
WIPO Patent Application WO/2013/157462
Kind Code:
A1
Abstract:
Provided is a wafer stocker in which external atmosphere inflow can be prevented, a prescribed atmosphere can be maintained in a way for accommodating space with a comparatively small amount of a gas, and in which it is possible to prevent dust and grit from adhering to the surfaces of wafers. Shutter parts formed from a plurality of shielding plates having a height dimension the same as the spacing of shelves disposed within an accommodating container are disposed with a minute gap opened with a main body part. By supplying a clean gas to the inside of the accommodating container, a clean atmosphere with higher pressure than the outside environment is maintained, and also the shutter part is opened and closed by moving the shielding plates up and down independently of the shelves that support wafers.
Inventors:
SAKIYA FUMIO (JP)
SAKATA KATSUNORI (JP)
SAKATA KATSUNORI (JP)
Application Number:
PCT/JP2013/060838
Publication Date:
October 24, 2013
Filing Date:
April 10, 2013
Export Citation:
Assignee:
RORZE CORP (JP)
International Classes:
H01L21/673
Domestic Patent References:
| WO2010137556A1 | 2010-12-02 |
Foreign References:
| JP2003068841A | 2003-03-07 | |||
| JP2008290862A | 2008-12-04 | |||
| JP2001077188A | 2001-03-23 | |||
| JPH0634253U | 1994-05-06 | |||
| JP2005259858A | 2005-09-22 | |||
| JP2009500256A | 2009-01-08 |
Other References:
See also references of EP 2840599A4
Attorney, Agent or Firm:
MATSUSHITA, MAKOTO (JP)
Matsushita δΊ® (JP)
Matsushita δΊ® (JP)
Download PDF: