ACOUSTIC WAVE DEVICE - MURATA MANUFACTURING CO

Title:

ACOUSTIC WAVE DEVICE

Document Type and Number:

WIPO Patent Application WO/2023/106334

Kind Code:

A1

Abstract:

Provided is an acoustic wave device with which electrical characteristics can be stabilized in a configuration in which an IDT is provided within a cavity portion.　An acoustic wave device 10 according to the present invention comprises: a support member 13 including a support substrate 16; a piezoelectric layer 14 which is provided on the support substrate 13 and which has a first main surface 14a positioned on the support member 13 side and a second main surface 14b opposing the first main surface 14a; and at least one IDT 11 which is provided on the first main surface 14a of the piezoelectric layer 14, and which has a plurality of electrode finger portions (a plurality of first and second electrode finger portions 19A, 19B). A cavity portion 12a surrounded by the support member 13 and the piezoelectric layer 14 is formed. The plurality of electrode finger portions of the at least one IDT 11 are positioned within the cavity portion 12a. Through-holes 14c are provided in the piezoelectric layer 14 so as to reach the cavity portion 12a. In the plurality of electrode finger portions of the at least one IDT 11, a dimensional relationship is established for at least one set of electrode finger portions, the dimensional relationship being that, in the set of the electrode finger portions, at least some of the electrode finger portions positioned closer to the through-holes 14c have a thickness that is less and a width that is greater than at least some of the electrode finger portions positioned farther from the through-holes 14c.

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Inventors:

YAMANE TAKASHI (JP)

Application Number:

PCT/JP2022/045102

Publication Date:

June 15, 2023

Filing Date:

December 07, 2022

Export Citation:

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Assignee:

MURATA MANUFACTURING CO (JP)

International Classes:

H03H9/145; H03H9/25

Foreign References:

JPH0643016A	1994-02-18
JP2014013991A	2014-01-23
JP2016123016A	2016-07-07
JPS63238706A	1988-10-04

Attorney, Agent or Firm:

OSAKA FRONT (JP)

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