Title:
ACOUSTO-OPTIC SCANNING SUPER-RESOLUTION OPTICAL FIBER LITHOGRAPHY MACHINE
Document Type and Number:
WIPO Patent Application WO/2024/007501
Kind Code:
A1
Abstract:
Provided in the embodiments of the present disclosure is an acousto-optic scanning super-resolution optical fiber lithography machine, comprising a control device, a super-resolution optical fiber laser light source, an optical scanning system and an electric drive workpiece table. In the embodiments of the present disclosure, an optical fiber is used for connection of a light source and a light focusing system for use in lithography, which avoids the use a plurality of optical lenses or lens groups in the design and production of a free-space optical lithography machine, so that the optical fiber lithography machine is simple in terms of the optical path of same and has greatly reduced manufacturing and maintenance costs; the super-resolution optical fiber laser light source is connected to the optical scanning system by means of the optical fiber, which avoids the use of lens groups to eliminate a phase difference and can thus greatly shorten the optical path to effectively reduce the geometric dimensions of the lithography machine; and the turning on/off of lithographic laser light energy is realized by means of electro-optical modulation, and the lithographic patterning function is achieved by combining non-mechanical optical scanning with the movement of an electric drive displacement table.
Inventors:
LI XIJUN (CN)
Application Number:
PCT/CN2022/131025
Publication Date:
January 11, 2024
Filing Date:
November 10, 2022
Export Citation:
Assignee:
UNIV WESTLAKE (CN)
International Classes:
G03F7/20
Foreign References:
| CN115061338A | 2022-09-16 | |||
| CN115128912A | 2022-09-30 | |||
| CN114488715A | 2022-05-13 | |||
| CN114488713A | 2022-05-13 | |||
| CN113189847A | 2021-07-30 | |||
| CN113189848A | 2021-07-30 | |||
| US20060093265A1 | 2006-05-04 |
Attorney, Agent or Firm:
KINGSOUND & PARTNERS (CN)
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