Title:
NON-MECHANICAL OPTICAL SCANNING FIBER PHOTOLITHOGRAPHY MACHINE
Document Type and Number:
WIPO Patent Application WO/2024/007502
Kind Code:
A1
Abstract:
Provided in the embodiments of the present disclosure is a non-mechanical optical scanning fiber photolithography machine, comprising a control apparatus, a laser light source, an optical scanning system and an electrically driven workpiece table. In the embodiments of the present disclosure, by using fibers, the laser light source and the optical scanning system, optical path adjustment is simplified, and a difficulty that a plurality of optical lenses or lens groups are used in design and production of a photolithography machine which emits laser in a free space is avoided, so that the design and installation of the optical path of the fiber photolithography machine is simple, and the manufacturing and maintenance cost is greatly reduced. The laser light source and the optical scanning system are connected by fibers, so that the geometric dimension of the photolithography machine is effectively reduced; by using electro-optical modulation or acousto-optic modulation, on-off of laser light energy for photoetching is achieved, and in combination with movement of an electrically driven displacement table and non-mechanical optical scanning, a patterning function of photoetching is achieved; and a plurality of fibers are used to form an array, and a single or a plurality of non-mechanical optical scanners are used to form an array, so as to form a multi-beam fiber photolithography machine, thereby improving the processing rate of the photolithography machine.
Inventors:
LI XIJUN (CN)
Application Number:
PCT/CN2022/131026
Publication Date:
January 11, 2024
Filing Date:
November 10, 2022
Export Citation:
Assignee:
UNIV WESTLAKE (CN)
International Classes:
G03F7/20
Foreign References:
| CN115128912A | 2022-09-30 | |||
| CN115061338A | 2022-09-16 | |||
| CN114488715A | 2022-05-13 | |||
| CN114488713A | 2022-05-13 | |||
| CN113189847A | 2021-07-30 | |||
| CN113189848A | 2021-07-30 |
Attorney, Agent or Firm:
KINGSOUND & PARTNERS (CN)
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