Title:
ACTIVE GAS GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/123615
Kind Code:
A1
Abstract:
The purpose of the present disclosure is to provide an active gas generation device having a structure for jetting out good-quality active gas free of impurities. An active gas generation device (100) according to the present disclosure comprises: a base flange (4) having a central bottom region (48) and a peripheral protrusion (46); a cooling plate (9) provided on the peripheral protrusion (46) of the base flange (4); an insulating plate (7) provided between the cooling plate (9) and a high voltage applying electrode unit (1); and an electrode holding member (8) provided on the bottom surface of the cooling plate (9) so as to support the high voltage applying electrode unit (1) from below. The cooling plate (9), the electrode holding member (8), and the high voltage applying electrode unit (1) provide a gas separation structure for separating a gas flow between a housing internal space (33) and a discharging space (6).
Inventors:
WATANABE KENSUKE (JP)
ARITA REN (JP)
ARITA REN (JP)
Application Number:
PCT/JP2020/045380
Publication Date:
June 16, 2022
Filing Date:
December 07, 2020
Export Citation:
Assignee:
TOSHIBA MITSUBISHI ELEC IND (JP)
International Classes:
H05H1/24; B01J19/08
Domestic Patent References:
| WO2019229873A1 | 2019-12-05 | |||
| WO2019229873A1 | 2019-12-05 |
Foreign References:
| JP2020115419A | 2020-07-30 | |||
| CN104103484A | 2014-10-15 |
Attorney, Agent or Firm:
YOSHITAKE Hidetoshi et al. (JP)
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