Title:
ALIGNMENT CALIBRATION SYSTEM AND METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/236069
Kind Code:
A1
Abstract:
An alignment calibration system and a method therefor. After an image sensing device (3) and an image capturing apparatus (4) respectively acquire alignment information, positioning information is obtained through computation so as to achieve precise alignment calibration, and when light spot array scanning is performed using the positioning information obtained in this way, the exposure precision can be greatly improved.
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Inventors:
LEE YUNG-CHUN (CN)
SYU YONG-SIN (CN)
WU CHUN-YING (CN)
MIAU TING-HSUAN (CN)
SYU YONG-SIN (CN)
WU CHUN-YING (CN)
MIAU TING-HSUAN (CN)
Application Number:
PCT/CN2022/097516
Publication Date:
December 14, 2023
Filing Date:
June 08, 2022
Export Citation:
Assignee:
LEE YUNG CHUN (CN)
International Classes:
G03F9/00; G03F7/20
Foreign References:
| CN104714375A | 2015-06-17 | |||
| CN104133350A | 2014-11-05 | |||
| CN107607040A | 2018-01-19 | |||
| CN102566340A | 2012-07-11 | |||
| CN102193339A | 2011-09-21 | |||
| JP2011211180A | 2011-10-20 | |||
| JP2006294854A | 2006-10-26 |
Attorney, Agent or Firm:
SHANGHAI YUANTONG LAW FIRM (CN)
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