Title:
ALIGNMENT DEVICE, METHOD FOR RESETTING ORIGIN OF ALIGNMENT DEVICE, AND TURN TABLE, TRANSLATION TABLE, MACHINE AND MACHINE CONTROL SYSTEM EQUIPPED WITH ALIGNMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2007/032196
Kind Code:
A1
Abstract:
An alignment device of table rotation through translation drive in which the
table can be operated with high precision XYθ, Yθ or θ. Each
of four drive systems for driving a table (4) mounting an object (5) comprises
a freely translating section (11), a translation drive section (12), and a freely
rotating section (13). A machine securing device (41) is provided with a motor
(1) and a detector (2) and the table (4) is secured accurately by the machine securing
device (41) using first and second alignment devices and first and second position
fixing devices. The alignment device can be reset to the origin by storing the
reference position of the detector in a device (44) for storing the reference
position of the detector.
Inventors:
KOMIYA TAKEHIKO (JP)
OSUGA TOSHIYUKI (JP)
KAKU YASUHIKO (JP)
OSUGA TOSHIYUKI (JP)
KAKU YASUHIKO (JP)
Application Number:
PCT/JP2006/316775
Publication Date:
March 22, 2007
Filing Date:
August 25, 2006
Export Citation:
Assignee:
YASKAWA DENKI SEISAKUSHO KK (JP)
KOMIYA TAKEHIKO (JP)
OSUGA TOSHIYUKI (JP)
KAKU YASUHIKO (JP)
KOMIYA TAKEHIKO (JP)
OSUGA TOSHIYUKI (JP)
KAKU YASUHIKO (JP)
International Classes:
G05D3/00; G05D3/12
Foreign References:
| JP2006215950A | 2006-08-17 | |||
| JP2005148045A | 2005-06-09 | |||
| JPH05162035A | 1993-06-29 | |||
| JPH05216514A | 1993-08-27 |
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