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Title:
ALUMINUM ALLOY MEMBER FOR FORMING FLUORIDE COATING FILM THEREON, AND ALUMINUM ALLOY MEMBER HAVING FLUORIDE COATING FILM
Document Type and Number:
WIPO Patent Application WO/2020/213307
Kind Code:
A1
Abstract:
Provided is an aluminum alloy member for forming a fluoride coating film thereon, which does not undergo the formation of dot-like black protruding portions and therefore has excellent smoothness and also has excellent corrosion resistance against corrosive gases, plasma and others. An aluminum alloy member 1 for forming a fluoride coating film thereon contains 0.01 to 0.3% by mass of Si, 0.5 to 5.0% by mass of Mg and 0.05 to 0.5% by mass of Fe, has a Cu content of 0.5% by mass or less, an Mn content of 0.30% by mass or less and a Cr content of 0.30% by mass or less, with the remainder made up by Al and unavoidable impurities, wherein, when the average longer diameter of Fe-based crystalized products in the aluminum alloy member is defined as "D" (μm) and the average crystal grain diameter in the aluminum alloy member is defined as "Y" (μm), the relational formula: log10Y < -0.320D+4.60 is satisfied. A fluoride coating film 2 is formed on at least a portion of a surface of the aluminum alloy member 1 for forming a fluoride coating film thereon.

Inventors:
MURASE ISAO (JP)
Application Number:
PCT/JP2020/010515
Publication Date:
October 22, 2020
Filing Date:
March 11, 2020
Export Citation:
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Assignee:
SHOWA DENKO KK (JP)
International Classes:
C22C21/06; C22F1/00; C22F1/04; C23C8/08; C23C14/06; C23C16/30; C23C28/04; C25D11/18; H01L21/205; H01L21/3065
Domestic Patent References:
WO2015060331A12015-04-30
WO2020008704A12020-01-09
Foreign References:
JPH0892684A1996-04-09
JP2006349881A2006-12-28
JP3871544B22007-01-24
JPH08260088A1996-10-08
Attorney, Agent or Firm:
SHIMIZU Yoshihito et al. (JP)
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