Title:
ANGULAR VELOCITY SENSOR
Document Type and Number:
WIPO Patent Application WO/2014/155997
Kind Code:
A1
Abstract:
An angular velocity sensor provided with a drive circuit for generating a drive signal, an oscillating weight, an oscillation unit for causing the oscillating weight to oscillate along a first and second axis according to the drive signal, an output unit for outputting a signal that is based on the Coriolis force generated in accordance with an angular velocity and the oscillation of the oscillating weight, a detection circuit for detecting the angular velocity from the signal that is based on the Coriolis force, and a first oscillation damping unit that electrically consumes the kinetic energy of the oscillating weight.
Inventors:
KATO SEIICHI (JP)
Application Number:
PCT/JP2014/001298
Publication Date:
October 02, 2014
Filing Date:
March 07, 2014
Export Citation:
Assignee:
ASAHI CHEMICAL IND (JP)
International Classes:
G01C19/56; H01L41/04; H01L41/113; H01L41/23
Foreign References:
| JP2011099818A | 2011-05-19 | |||
| JP2006342864A | 2006-12-21 | |||
| JP2008108762A | 2008-05-08 | |||
| JP2012037499A | 2012-02-23 |
Attorney, Agent or Firm:
RYUKA IP LAW FIRM (JP)
Ryuka international patent business corporation (JP)
Ryuka international patent business corporation (JP)
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