Title:
APPARATUS AND METHOD FOR CLEANING A BELL JAR IN A BARREL EPITAXIAL REACTOR
Document Type and Number:
WIPO Patent Application WO2002020881
Kind Code:
A3
Abstract:
An epitaxial cleaning apparatus has a blower controller module and controller module code. The blower controller module is connected between a blower of an epitaxial deposition device having a reaction chamber, a blower and a plurality of plenum chambers for delivering cooling air from the blower to the reaction chamber, and a blower power source for controlling the speed of the blower. The controller module code for controlling the blower controller module is installed within a control module connected to the epitaxial deposition device for controlling the operation of the epitaxial deposition device.
Inventors:
DUNN FRANK J (US)
Application Number:
PCT/US2001/026941
Publication Date:
June 06, 2002
Filing Date:
August 28, 2001
Export Citation:
Assignee:
CXE EQUIPMENT SERVICES LLC (US)
DUNN FRANK J (US)
DUNN FRANK J (US)
International Classes:
H01L21/205; C23C16/44; C23C16/52; C30B25/10; (IPC1-7): C30B25/10; C23C16/44
Foreign References:
| US5855677A | 1999-01-05 | |||
| EP0808917A1 | 1997-11-26 | |||
| EP0296804A2 | 1988-12-28 | |||
| US5288364A | 1994-02-22 | |||
| US5279986A | 1994-01-18 | |||
| US5207835A | 1993-05-04 | |||
| US5053247A | 1991-10-01 | |||
| US6026891A | 2000-02-22 |
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