Title:
APPARATUS AND METHOD FOR SURFACE COATING BY MEANS OF GRID CONTROL AND PLASMA-INITIATED GAS-PHASE POLYMERIZATION
Document Type and Number:
WIPO Patent Application WO/2017/193561
Kind Code:
A1
Abstract:
An apparatus and a method for surface coating by means of grid control and plasma-initiated gas-phase polymerization. The method comprises: dividing a vacuum chamber into a discharging cavity (2) and a processing chamber (3) by using a metal grid mesh (1), the metal grid mesh (1) being insulated from the vacuum chamber; separately feeding carrier gas and monomer steam into the discharging cavity (2) and the processing chamber (3) through different pipes (4, 5), putting a substrate to be processed (11) in the processing chamber (3), and generating in the discharging cavity (2) plasma that continuously discharges; and applying pulse positive bias to the metal grid mesh (1), to release the plasma into the processing chamber (3) to initiate monomer polymerization.
Inventors:
ZHONG JIAN (CN)
Application Number:
PCT/CN2016/105126
Publication Date:
November 16, 2017
Filing Date:
November 08, 2016
Export Citation:
Assignee:
WUXI RJ IND CO LTD (CN)
International Classes:
C09D4/00; C08F2/52; C09D4/02; C23C14/00; C23C16/00
Foreign References:
| CN105949836A | 2016-09-21 | |||
| CN205616834U | 2016-10-05 | |||
| CN102024658A | 2011-04-20 | |||
| CN104282522A | 2015-01-14 | |||
| CN105112883A | 2015-12-02 | |||
| CN1320947A | 2001-11-07 |
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