APPLICATION DEVICE, APPLICATION METHOD, AND COMPUTER STORAGE MEDIUM

Title:

APPLICATION DEVICE, APPLICATION METHOD, AND COMPUTER STORAGE MEDIUM

Document Type and Number:

WIPO Patent Application WO/2019/021859

Kind Code:

A1

Abstract:

This application device applies an application liquid to a substrate, said application liquid containing an optical material. The application device has: a holding section that holds the substrate; an application nozzle for discharging the application liquid to the substrate held by the holding section; a moving mechanism that relatively moves the holding section and the application nozzle in the orthogonal directions; and a liquid receiving section, which is provided, in a plan view, on both outer sides of the substrate held by the holding section, and which receives the application liquid discharged from the application nozzle.

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Inventors:

NISHIMURA NORIHIKO (JP)

Application Number:

PCT/JP2018/026496

Publication Date:

January 31, 2019

Filing Date:

July 13, 2018

Export Citation:

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Assignee:

TOKYO ELECTRON LTD (JP)

International Classes:

B05C11/10; B05C5/02; B05C13/02; B05D1/26; B05D3/00; B05D5/06; G02B5/30

Domestic Patent References:

WO2012140905A1

2012-10-18

Foreign References:

JP2013202489A	2013-10-07
JP2013184126A	2013-09-19
JPH1099764A	1998-04-21
JPH07232120A	1995-09-05
JP2014147857A	2014-08-21

Attorney, Agent or Firm:

KANEMOTO, Tetsuo et al. (JP)

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