Title:
AQUEOUS DISPERSION COMPRISING INORGANIC PARTICLES
Document Type and Number:
WIPO Patent Application WO/2022/240220
Kind Code:
A1
Abstract:
Inorganic particles contained in an aqueous dispersion according to the present invention are composed of an aggregation of crystalline and amorphous small particles, and exhibit a spherical and smooth surface. The spherical appearance, low crystallinity, and narrow particle size distribution of the inorganic particles are more advantageous in reducing scratch defects in a CMP process. In addition, the inorganic particles are advantageous as a next-generation CMP abrasive due to an excellent removal rate as the small particles on the surface of the inorganic particles provide more active sites. Moreover, the aqueous dispersion according to the present invention further comprises an ammonium salt, and has the effect of improving the removal rate of a nitride film by promoting hydrolysis of the nitride film.
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Inventors:
KIM TAESUNG (KR)
KWAK DONGGEON (KR)
YUN JUNHO (KR)
NAM JAE-DO (KR)
KIM NA YEON (KR)
KWAK DONGGEON (KR)
YUN JUNHO (KR)
NAM JAE-DO (KR)
KIM NA YEON (KR)
Application Number:
PCT/KR2022/006844
Publication Date:
November 17, 2022
Filing Date:
May 12, 2022
Export Citation:
Assignee:
RESEARCH ＆ BUSINESS FOUNDATION SUNGKYUNKWAN UNIV (KR)
International Classes:
C09G1/02; C09K3/14
Foreign References:
| KR20200082046A | 2020-07-08 | |||
| JP2017505532A | 2017-02-16 | |||
| KR100596688B1 | 2006-07-07 | |||
| KR20170004462A | 2017-01-11 |
Other References:
CHAVHAN MADHAV P.; LU CHUNG-HSIN; SOM SUDIPTA: "Urea and surfactant assisted hydrothermal growth of ceria nanoparticles", COLLOIDS AND SURFACES A : PHYSIOCHEMICAL AND ENGINEERINGS ASPECTS, vol. 601, 6 May 2020 (2020-05-06), AMSTERDAM, NL , XP086237067, ISSN: 0927-7757, DOI: 10.1016/j.colsurfa.2020.124944
Attorney, Agent or Firm:
KIM, Aera (KR)
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