Title:
ARRAY SUBSTRATE AND PREPARATION METHOD THEREFOR, AND DISPLAY PANEL
Document Type and Number:
WIPO Patent Application WO/2023/206621
Kind Code:
A1
Abstract:
Provided in the present invention are an array substrate and a preparation method therefor, and a display panel. The array substrate comprises: a gate layer, which is provided on a base layer; a first insulating layer, which is provided on the base layer and covers the gate layer; a second insulating layer, which is provided on the surface of the first insulating layer that is away from the gate layer; an active layer, which is provided on the surface of the second insulating layer that is away from the first insulating layer; and a source/drain layer, which is provided on the first insulating layer and is electrically connected to the active layer, wherein the material of the first insulating layer comprises silicon nitride, and the material of the second insulating layer comprises silicon oxide.
Inventors:
WU WEI (CN)
Application Number:
PCT/CN2022/092684
Publication Date:
November 02, 2023
Filing Date:
May 13, 2022
Export Citation:
Assignee:
GUANGZHOU CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD (CN)
International Classes:
H01L29/786; H01L27/12
Foreign References:
| CN202423298U | 2012-09-05 | |||
| CN213660407U | 2021-07-09 | |||
| CN101685835A | 2010-03-31 | |||
| US20110180802A1 | 2011-07-28 |
Attorney, Agent or Firm:
PURPLEVINE INTELLECTUAL PROPERTY (SHENZHEN) CO., LTD. (CN)
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