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Title:
BAND NARROWING GAS LASER APPARATUS, METHOD FOR CONTROLLING SAME, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/186742
Kind Code:
A1
Abstract:
This method for controlling a band narrowing gas laser apparatus comprises: receiving, from an external device, either command of a one-wavelength mode command or a multiple-wavelength mode command; and controlling the band narrowing gas laser apparatus such that pulsed laser light is generated in accordance with the command.

Inventors:
KUMAZAKI TAKAHITO (JP)
WAKABAYASHI OSAMU (JP)
Application Number:
PCT/JP2020/012545
Publication Date:
September 23, 2021
Filing Date:
March 19, 2020
Export Citation:
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Assignee:
GIGAPHOTON INC (JP)
International Classes:
G03F7/20; H01S3/1055
Foreign References:
JP2006269631A2006-10-05
JP2006269628A2006-10-05
JP2007005538A2007-01-11
JP2007250947A2007-09-27
US6834069B12004-12-21
US20100027579A12010-02-04
US9905990B12018-02-27
Attorney, Agent or Firm:
HOSAKA Nobuhisa (JP)
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