Title:
NARROWBAND APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/186743
Kind Code:
A1
Abstract:
A narrowband apparatus comprises: first and second prisms disposed in differing positions in the wavelength dispersion direction of each of the first and second prism; a third prism disposed in the light path of a light beam, the third prism expanding the beam width of the light beam and causing a first portion of the light beam to be incident on the first prism, and causing a second portion of the light beam to be incident on the second prism; a grating disposed spanning the light path of the first portion that passed through the first prism, and the light path of the second portion that passed through the second prism; a first actuator that adjusts the incidence angle of the first portion in relation to the grating; a second actuator that adjusts the incidence angle of the second portion in relation to the grating; and a third actuator that adjusts the energy ratio of the first portion and the second portion.
Inventors:
KUMAZAKI TAKAHITO (JP)
WAKABAYASHI OSAMU (JP)
WAKABAYASHI OSAMU (JP)
Application Number:
PCT/JP2020/012546
Publication Date:
September 23, 2021
Filing Date:
March 19, 2020
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
G03F7/20; H01S3/1055
Domestic Patent References:
| WO2016189968A1 | 2016-12-01 | |||
| WO2016189722A1 | 2016-12-01 |
Foreign References:
| JP2006269628A | 2006-10-05 | |||
| JP2007005538A | 2007-01-11 | |||
| JP2013062484A | 2013-04-04 | |||
| JP2009130351A | 2009-06-11 | |||
| JP2014072506A | 2014-04-21 | |||
| JP2013089680A | 2013-05-13 | |||
| US20020154661A1 | 2002-10-24 |
Attorney, Agent or Firm:
HOSAKA Nobuhisa (JP)
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