BULK ACOUSTIC WAVE RESONANCE DEVICE AND METHOD FOR FORMING SAME, FILTERING DEVICE, AND RADIO FREQUENCY FRONT END DEVICE

Title:

BULK ACOUSTIC WAVE RESONANCE DEVICE AND METHOD FOR FORMING SAME, FILTERING DEVICE, AND RADIO FREQUENCY FRONT END DEVICE

Document Type and Number:

WIPO Patent Application WO/2023/284766

Kind Code:

A1

Abstract:

A BAW resonance device, comprising: a first electrode layer, the first electrode layer comprising a first sub-layer and a second sub-layer; a piezoelectric layer, the first electrode layer being located on a first side of the piezoelectric layer; a second electrode layer, located on a second side, the second electrode layer comprising a third sub-layer and a fourth sub-layer, and a region where the first sub-layer, the third sub-layer, and the piezoelectric layer overlap being a resonance region; a first passive structure, in contact with at least one edge of the first sub-layer; and a second passive structure, in contact with at least one edge of the third sub-layer. The first passive structure comprises: a first lift portion, located in the resonance region; a first passivation portion, located between the first lift portion and the first electrode layer; and a first extension portion, located outside the resonance region, the first lift portion protruding relative to the first extension portion. The second passive structure comprises: a second lift portion, located in the resonance region; a second passivation portion, located between the second lift portion and the second electrode layer; and a second extension portion, located outside the resonance region, the second lift portion protruding relative to the second extension portion. Zp and Q value are increased.

Inventors:

HAN XING (CN)
ZHOU JIAN (CN)

Application Number:

PCT/CN2022/105361

Publication Date:

January 19, 2023

Filing Date:

July 13, 2022

Export Citation:

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Assignee:

CHANGZHOU CHEMSEMI CO LTD (CN)

International Classes:

H03H9/17; H03H9/13

Foreign References:

CN113839647A	2021-12-24
CN114499451A	2022-05-13
CN113839640A	2021-12-24
CN114421917A	2022-04-29
CN112039486A	2020-12-04
CN111654259A	2020-09-11
JP2010130294A	2010-06-10

Attorney, Agent or Firm:

UNITALEN ATTORNEYS AT LAW (CN)

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