Title:
BULK ACOUSTIC WAVE RESONATOR DEVICE AND METHOD FOR FORMING SAME, FILTERING DEVICE, AND RADIO FREQUENCY FRONT END DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/284767
Kind Code:
A1
Abstract:
A bulk acoustic wave resonator device of the present invention comprises: a cavity; a first electrode layer, at least one end of the first electrode layer being located above or inside the cavity; a piezoelectric layer, the cavity and the first electrode layer being located on a first side of the piezoelectric layer; a second electrode layer located on a second side, a region where the first electrode layer, the second electrode layer and the piezoelectric layer overlap being a resonance region; a first passive structure located on the first side and having a first overlapping portion with at least one edge of the first electrode layer; and a second passive structure located on the second side and having a second overlapping portion with at least one edge of the second electrode layer. The first passive structure comprises: a first raised portion located inside the resonance region; and a first extension portion located outside the resonance region, wherein the first raised portion protrudes with respect to the first extension portion. The second passive structure comprises: a second raised portion located inside the resonance region; and a second extension portion located outside the resonance region, wherein the second raised portion protrudes with respect to the second extension portion. The present invention suppresses parasitic edge mode, and improves ZPand corresponding Q values.
Inventors:
HAN XING (CN)
ZHOU JIAN (CN)
ZHOU JIAN (CN)
Application Number:
PCT/CN2022/105362
Publication Date:
January 19, 2023
Filing Date:
July 13, 2022
Export Citation:
Assignee:
CHANGZHOU CHEMSEMI CO LTD (CN)
International Classes:
H03H9/02; H03H3/02; H03H9/05
Foreign References:
| CN113839640A | 2021-12-24 | |||
| CN114421917A | 2022-04-29 | |||
| CN113839647A | 2021-12-24 | |||
| CN114499451A | 2022-05-13 | |||
| CN112039486A | 2020-12-04 | |||
| CN112532195A | 2021-03-19 | |||
| CN111654259A | 2020-09-11 |
Attorney, Agent or Firm:
UNITALEN ATTORNEYS AT LAW (CN)
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