Title:
CALIBRATION SYSTEM AND CALIBRATION METHOD
Document Type and Number:
WIPO Patent Application WO/2023/058253
Kind Code:
A1
Abstract:
Provided is a calibration system provided with a stage, a weighting jig, a parallel link mechanism, and a control device. A weighted body comprises: a force sensor for outputting a value based on a load value including a component of at least one axial direction, such component being from among components of six axial directions of a load applied to the weighted body; and a master sensor that has been calibrated so as to output a load value in accordance with a load. The weighting jig clamps the weighted body against the stage, thus fixing the weighted body. The parallel link mechanism is composed of six rods. The parallel link mechanism has output units corresponding respectively to the six rods. The six rods are coupled in parallel to the weighting jig. The control device controls the outputs of each of the output units, causes the weighting jig to be displaced relative to the stage, and calibrates the force sensor on the basis of the value outputted from the force sensor and the load value outputted from the master sensor.
Inventors:
TANAAMI YOSHIKANE (JP)
OSAWA ATSUSHI (JP)
KOBAYASHI TAKUMI (JP)
OSAWA ATSUSHI (JP)
KOBAYASHI TAKUMI (JP)
Application Number:
PCT/JP2021/045596
Publication Date:
April 13, 2023
Filing Date:
December 10, 2021
Export Citation:
Assignee:
SINTOKOGIO LTD (JP)
International Classes:
G01L25/00; G01L5/16
Foreign References:
| KR100679138B1 | 2007-02-05 | |||
| US20160273990A1 | 2016-09-22 | |||
| JPS63109344A | 1988-05-14 | |||
| CN101451933A | 2009-06-10 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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