Title:
CAPACITANCE TYPE PHYSICAL QUANTITY SENSOR
Document Type and Number:
WIPO Patent Application WO/2013/187018
Kind Code:
A1
Abstract:
Disclosed is a capacitance type physical quantity sensor comprising a movable electrode (18) formed in a weight part (17), and a fixed electrode (19) facing the movable electrode. A first movable sensing electrode (21) and a first fixed sensing electrode (24) face each other in a first y direction. A second movable sensing electrode (22) and a second fixed sensing electrode (25) face each other in a second y direction. A first movable damping electrode (23) is located in the middle between two first fixed damping electrodes (26), faces one of the first fixed damping electrodes in the first y direction and faces the other of the first fixed damping electrodes in the second y direction. A plurality of first movable damping electrodes are located point-symmetrically with respect to the center (CP) of the weight part or line-symmetrically with respect to a center line (CL) passing the center along a y direction.
Inventors:
OGAWA AKIRA (JP)
Application Number:
PCT/JP2013/003546
Publication Date:
December 19, 2013
Filing Date:
June 06, 2013
Export Citation:
Assignee:
DENSO CORP (JP)
International Classes:
G01P15/125; G01P21/00; H01L29/84
Foreign References:
| JP2009168777A | 2009-07-30 | |||
| JP2011058819A | 2011-03-24 | |||
| US20110083506A1 | 2011-04-14 | |||
| JP2010203990A | 2010-09-16 | |||
| JPH1151967A | 1999-02-26 | |||
| JP2011163967A | 2011-08-25 | |||
| JPH06160419A | 1994-06-07 | |||
| JP2009047649A | 2009-03-05 |
Attorney, Agent or Firm:
KIN, Junhi (JP)
Gold Junki (JP)
Gold Junki (JP)
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