Title:
CAPACITIVE MICRO-ELECTRO-MECHANICAL SYSTEM MICROPHONE, MICROPHONE UNIT, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/253499
Kind Code:
A1
Abstract:
Provided in the embodiments of the present disclosure are a capacitive micro-electro-mechanical system microphone, a microphone unit, and an electronic device. The capacitive micro-electro-mechanical system microphone comprises a back electrode plate; a diaphragm; and a spacer, used for spacing apart the back electrode plate and the diaphragm; when no working bias is applied, at least part of the diaphragm is pre-stretched in the direction away from the back electrode plate relative to a flat position.
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Inventors:
ZOU QUANBO (CN)
DANG MAOQIANG (CN)
WANG DEXIN (CN)
DANG MAOQIANG (CN)
WANG DEXIN (CN)
Application Number:
PCT/CN2020/099425
Publication Date:
December 23, 2021
Filing Date:
June 30, 2020
Export Citation:
Assignee:
GOERTEKMICROELECTRONICS CO LTD (CN)
International Classes:
H04R19/04
Foreign References:
| CN110351641A | 2019-10-18 | |||
| CN108367908A | 2018-08-03 | |||
| US20060280319A1 | 2006-12-14 | |||
| US20150014797A1 | 2015-01-15 | |||
| US20180352339A1 | 2018-12-06 |
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