Title:
CAPACITIVE MICROELECTROMECHANICAL SYSTEM MICROPHONE, MICROPHONE UNIT AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/253498
Kind Code:
A1
Abstract:
Provided in the embodiments of the present description are a capacitive microelectromechanical system microphone, a microphone unit and an electronic device. The capacitive microelectromechanical system microphone comprises: a back polar plate; a vibrating diaphragm; and a spacer for separating the back polar plate from the vibrating diaphragm, wherein in a state in which an operating bias is applied, the ratio of the static effective displacement of the vibrating diaphragm relative to a flat position to the thickness of the vibrating diaphragm is greater than or equal to 0.5.
Inventors:
ZOU QUANBO (CN)
DANG MAOQIANG (CN)
WANG DEXIN (CN)
DANG MAOQIANG (CN)
WANG DEXIN (CN)
Application Number:
PCT/CN2020/099407
Publication Date:
December 23, 2021
Filing Date:
June 30, 2020
Export Citation:
Assignee:
GOERTEKMICROELECTRONICS CO LTD (CN)
International Classes:
H04R19/04
Foreign References:
| CN104883651A | 2015-09-02 | |||
| CN110351641A | 2019-10-18 | |||
| CN105492373A | 2016-04-13 | |||
| US20110317857A1 | 2011-12-29 |
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