Title:
CAPACITIVE PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2015/076413
Kind Code:
A1
Abstract:
In order to provide a capacitive pressure sensor that makes it possible to prevent pressure measurements from being affected by either temperature variations or electromagnetic noise in the air, an electrode part is provided with the following: a measuring electrode that has an electrode surface and is affixed to an insulating positioning part; a signal-extracting electrode that is fixed in place by an insulating seal that seals a second end of a body; and a flexible connecting member that electrically connects the measuring electrode and the signal-extracting electrode. An accommodating concavity formed in either the measuring electrode or the signal-extracting electrode accommodates the flexible connecting member.
Inventors:
KISHIDA SOTARO (JP)
HATAITA TAKEHISA (JP)
KUWAHARA AKIRA (JP)
HATAITA TAKEHISA (JP)
KUWAHARA AKIRA (JP)
Application Number:
PCT/JP2014/081103
Publication Date:
May 28, 2015
Filing Date:
November 25, 2014
Export Citation:
Assignee:
HORIBA STEC CO LTD (JP)
International Classes:
G01L9/12
Foreign References:
| JP3423686B2 | 2003-07-07 | |||
| JP4014006B2 | 2007-11-28 | |||
| JP2003505688A | 2003-02-12 |
Other References:
See also references of EP 2993454A4
Attorney, Agent or Firm:
NISHIMURA, RYUHEI (JP)
Ryuhei Nishimura (JP)
Ryuhei Nishimura (JP)
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