CAPACITIVE PRESSURE SENSOR - HORIBA STEC CO LTD

Title:

CAPACITIVE PRESSURE SENSOR

Document Type and Number:

WIPO Patent Application WO/2015/076414

Kind Code:

A1

Abstract:

In order to provide a capacitive pressure sensor that makes it possible to prevent misalignment between a diaphragm and an electrode surface in a direction parallel to said diaphragm and allows precise pressure measurement, this capacitive pressure sensor is provided with the following: a diaphragm that is deformed by pressure; an electrode part that has an electrode surface that faces the diaphragm such that a gap is formed therebetween; a body inside which at least part of the electrode part is accommodated, the diaphragm being joined to one end of said body; an insulating positioning part that is provided inside the body and positions at least part of the electrode part inside the body; and a pressure-applying mechanism that supports the insulating positioning part or the electrode part by applying pressure thereto in a direction parallel to the diaphragm.

More Like This:

WO/1996/026670	IMPLANTABLE CAPACITIVE ABSOLUTE PRESSURE AND TEMPERATURE SENSOR
JPH09273970	ELECTRO-STATIC PRESSURE SENSOR AND GAS ABNORMALITY MONITOR USING THE SAME
WO/2019/170798	METHOD FOR OPERATING A CAPACITIVE PRESSURE MEASUREMENT CELL, AND A CAPACITIVE PRESSURE MEASUREMENT DEVICE

Inventors:

KISHIDA SOTARO (JP)
HATAITA TAKEHISA (JP)
KUWAHARA AKIRA (JP)

Application Number:

PCT/JP2014/081104

Publication Date:

May 28, 2015

Filing Date:

November 25, 2014

Export Citation:

Click for automatic bibliography generation Help

Assignee:

HORIBA STEC CO LTD (JP)

International Classes:

G01L9/12

Foreign References:

JP5179752B2	2013-04-10
JP5133484B2	2013-01-30
JP2003505688A	2003-02-12

Other References: