CATA-DIOPTRIC IMAGING SYSTEM, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD

Title:

CATA-DIOPTRIC IMAGING SYSTEM, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD

Document Type and Number:

WIPO Patent Application WO/2007/086220

Kind Code:

A1

Abstract:

Provided is a cata-dioptric imaging system of a highly numerical aperture, which has its various aberrations satisfactorily corrected by using neither a reflecting surface having an aspherical shape of a high order nor a reciprocal optical element. The cata-dioptric imaging system forms the image of a first plane (R) on a second plane (W), and is constituted to include a first focusing system (G1) for forming a first intermediate image of the first plane on the basis of a light from the first plane, a second focusing system (G2) having two concave reflecting mirrors (CM21, CM22) for forming a second intermediate image of the first plane on the basis of a light coming from the first intermediate image, and a third focusing system (G3) for forming the final image of the first plane on the second plane on the basis of a light coming from the second intermediate image. The two concave reflecting mirrors have long spheroidal reflecting surfaces.

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Inventors:

OMURA YASUHIRO (JP)

Application Number:

PCT/JP2006/325711

Publication Date:

August 02, 2007

Filing Date:

December 25, 2006

Export Citation:

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Assignee:

NIKON CORP (JP)
OMURA YASUHIRO (JP)

International Classes:

G02B17/08; G02B13/24; G03F7/20; H01L21/027

Foreign References:

JP2005233979A	2005-09-02
JP2004333761A	2004-11-25

Other References: