Title:
CERAMIC HEATER AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2020/153218
Kind Code:
A1
Abstract:
A ceramic heater (10) is provided with a ceramic plate (20). The ceramic plate (20) has a wafer placement surface (20a), contains a carbon component as impurities, and is divided into an inner-circumferential-side zone (Z1) and an outer-circumferential-side zone (Z2). An inner-circumferential-side resistance heating element (22) made of a high-melting-point metal is provided in the inner-circumferential-side zone (Z1). An outer-circumferential-side resistance heating element (24), in which at least a surface is made of a metal carbide, is provided in the outer-circumferential-side zone (Z2).
Inventors:
ISHIKAWA MASAKI (JP)
MOTOYAMA SHUICHIRO (JP)
MOTOYAMA SHUICHIRO (JP)
Application Number:
PCT/JP2020/001239
Publication Date:
July 30, 2020
Filing Date:
January 16, 2020
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
H05B3/02; H05B3/10; H05B3/14
Foreign References:
| JPH0677148A | 1994-03-18 | |||
| JP2006228633A | 2006-08-31 | |||
| JP2017147126A | 2017-08-24 |
Attorney, Agent or Firm:
ITEC INTERNATIONAL PATENT FIRM (JP)
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