Title:
CERAMIC HEATER AND PRODUCTION METHOD FOR SAME
Document Type and Number:
WIPO Patent Application WO/2021/172262
Kind Code:
A1
Abstract:
An electrostatic chuck heater comprises a resistance heating element 16. The resistance heating element 16 is divided into a plurality of sections S from one end of the resistance heating element 16 to another end. A recessed groove R is provided to the surface of each section S along the longitudinal direction of the resistance heating element 16. Each connecting part between recessed grooves R that are provided to neighboring sections S is provided with a protruding part Rm that extends along the connecting part.
Inventors:
AKAO TAKAYOSHI (JP)
HIRATA NATSUKI (JP)
HIRATA NATSUKI (JP)
Application Number:
PCT/JP2021/006589
Publication Date:
September 02, 2021
Filing Date:
February 22, 2021
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
H05B3/12; H05B3/20; H05B3/28; H05B3/74
Foreign References:
| JP2006228633A | 2006-08-31 | |||
| JP2006054125A | 2006-02-23 | |||
| JP2002190373A | 2002-07-05 |
Attorney, Agent or Firm:
ITEC INTERNATIONAL PATENT FIRM (JP)
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