Title:
CHARGED PARTICLE BEAM APPARATUS AND SAMPLE IMAGE ACQUIRING METHOD
Document Type and Number:
WIPO Patent Application WO/2015/033601
Kind Code:
A1
Abstract:
Disclosed is a charged particle beam apparatus wherein a partitioning film capable of transmitting a charged particle beam is provided between a charged particle optical system and a sample, said charged particle beam apparatus eliminating a contact between the sample and the partitioning film even in the cases where the sample has recesses and protrusions.
On the basis of detection signals or an image generated on the basis of the detection signals, a distance between a sample (6) and a partitioning film (10) is monitored, said detection signals being outputted from a detector (3) that detects secondary charged particles discharged from the sample (6) due to irradiation of a primary charged particle beam.
Inventors:
OMINAMI YUSUKE (JP)
NISHIMURA MASAKO (JP)
KAWANISHI SHINSUKE (JP)
SUZUKI HIROYUKI (JP)
NISHIMURA MASAKO (JP)
KAWANISHI SHINSUKE (JP)
SUZUKI HIROYUKI (JP)
Application Number:
PCT/JP2014/056094
Publication Date:
March 12, 2015
Filing Date:
March 10, 2014
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/28; H01J37/16; H01J37/18; H01J37/20
Foreign References:
| JP2013175376A | 2013-09-05 |
Attorney, Agent or Firm:
INOUE Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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